Reactive Ion
| Name | Organisation | Location |
|---|---|---|
| RIE Etching System | School of Electronic & Electrical Eng | Dry Etch Lab (Bragg Centre) |
| Dry etch system 1 | Dry Etch Lab (Bragg Centre) | |
| Dry etch system 2 | Dry Etch Lab (Bragg Centre) | |
| Dry etch system 3 |
| Name | Organisation | Location |
|---|---|---|
| RIE Etching System | School of Electronic & Electrical Eng | Dry Etch Lab (Bragg Centre) |
| Dry etch system 1 | Dry Etch Lab (Bragg Centre) | |
| Dry etch system 2 | Dry Etch Lab (Bragg Centre) | |
| Dry etch system 3 |