Chemical Vapour Deposition
| Name | Organisation | Location |
|---|---|---|
| PVD System | School of Mechanical Engineering | Strength of Materials Lab |
| Plasma Enhanced Chemical Vapour Depositi | School of Electronic & Electrical Eng | Dry Etch Lab (Bragg Centre) |
| Multi Chamber Deposition System | Vacuum Suite | |
| Parylene Coater | Dry Etch Lab (Bragg Centre) | |
| Dry etch system 4 | Dry Etch Lab (Bragg Centre) |