Christopher Wood
Email: c.d.wood@leeds.ac.uk
Telephone: 0113-34-38335
| Name | Location |
|---|---|
| LEO 1530 FEG Scanning Electron Microsope | Metrology Lab (Bragg Centre) |
| Turnkey Electron Beam Lithography System | Electric Beam Lithography Room |
| Thermal Metal Evaporator | Deposition (Bragg Centre) |
| Spectra Physics MaiTai | THZ Research Lab Pollard Institute |
| Sputter system | Deposition (Bragg Centre) |
| Dicing Saw | Packaging/Dirty Process (Bragg Centre) |
| Electron Beam Lithography System | JEOL Lab (Bragg Centre) |
| Lapping and Polishing Machine, PM5C | Packaging/Dirty Process (Bragg Centre) |
| Scriber, S100 | Packaging/Dirty Process (Bragg Centre) |
| Mask Aligner, EV610 | Photo Lith Lab (Bragg Centre) |
| Wafer Bonding System | Deposition (Bragg Centre) |
| Electronic Network Switch 32x32 | Electric Beam Lithography Room |
| RIE Etching System | Dry Etch Lab (Bragg Centre) |
| Plasma Enhanced Chemical Vapour Depositi | Dry Etch Lab (Bragg Centre) |
| Direct Laser Writer | Photo Lith Lab (Bragg Centre) |
| Spectroscopic Ellipsometer | Dry Etch Lab (Bragg Centre) |
| Ion Miller | Dry Etch Lab (Bragg Centre) |
| Electron Beam Evaporation System | Deposition (Bragg Centre) |
| 3D Optical Profiler | Metrology Lab (Bragg Centre) |
| Megasonic Cleaner | Photo Lith Lab (Bragg Centre) |
| Parylene Coater | Dry Etch Lab (Bragg Centre) |
| Reflectometer | Metrology Lab (Bragg Centre) |
| Surface Profilometer | Metrology Lab (Bragg Centre) |
| Die Bonder | Deposition (Bragg Centre) |
| Wire bonder | Packaging/Dirty Process (Bragg Centre) |
| CNC Machine | Metrology Lab (Bragg Centre) |
| semiconductor parameter analyser | Packaging/Dirty Process (Bragg Centre) |