Christopher Wood

Email: c.d.wood@leeds.ac.uk

Telephone: 0113-34-38335

NameLocation
LEO 1530 FEG Scanning Electron MicrosopeMetrology Lab (Bragg Centre)
Turnkey Electron Beam Lithography SystemFallow Space
AS-one FurnaceNanoTechnology Laboratory No.2
Vacuum experimentation systemNanoTechnology Laboratory No.2
Dimension 3100 Nanoscope AFMCryogenics Office
Alpha Step IQ Surface ProfilerNanoTechnology Laboratory No.2
Thermal Metal EvaporatorDeposition (Bragg Centre)
Spectra Physics MaiTaiTHZ Research Lab Pollard Institute
Sputter systemDeposition (Bragg Centre)
Dicing SawPackaging/Dirty Process (Bragg Centre)
Electron Beam Lithography SystemJEOL Lab (Bragg Centre)
Lapping and Polishing Machine, PM5CPackaging/Dirty Process (Bragg Centre)
Scriber, S100Packaging/Dirty Process (Bragg Centre)
Mask Aligner, EV610Photo Lith Lab (Bragg Centre)
Wafer Bonding SystemDeposition (Bragg Centre)
Electronic Network Switch 32x32Fallow Space
RIE Etching SystemDry Etch Lab (Bragg Centre)
Plasma Enhanced Chemical Vapour DepositiDry Etch Lab (Bragg Centre)
Direct Laser WriterPhoto Lith Lab (Bragg Centre)
Spectroscopic EllipsometerDry Etch Lab (Bragg Centre)
Ion MillerDry Etch Lab (Bragg Centre)
Electron Beam Evaporation SystemDeposition (Bragg Centre)
3D Optical ProfilerMetrology Lab (Bragg Centre)
Megasonic CleanerPhoto Lith Lab (Bragg Centre)
Parylene CoaterDry Etch Lab (Bragg Centre)
ReflectometerMetrology Lab (Bragg Centre)
Surface ProfilometerMetrology Lab (Bragg Centre)
Die BonderDeposition (Bragg Centre)
Microwave/RF Probe stationPackaging/Dirty Process (Bragg Centre)
Wire bonderPackaging/Dirty Process (Bragg Centre)
CNC MachineMetrology Lab (Bragg Centre)
PVD SystemMetrology Lab (Bragg Centre)
semiconductor parameter analyserPackaging/Dirty Process (Bragg Centre)
Temperature Monitor for MBE and Vacuum C