Dry etch system 1
Details
| Manufacturer | OXFORD INSTRUMENTS NANOTECH |
|---|---|
| Model No. | |
| Serial No. | |
| Location | Dry Etch Lab (Bragg Centre) [1-086-0060-00MB-22] |
| Identifier | 10549143 |
| Owner |
Edmund Linfield
e.h.linfield@leeds.ac.uk 0113-34-32015 |
| Contact |
Christopher Wood
c.d.wood@leeds.ac.uk 0113-34-38335 |
| Category / Taxonomy | Process Equipment - Physical > Etching > Reactive Ion |