Electron Beam Evaporation System
Details
| Manufacturer | ANGSTROM ENGINEERING |
|---|---|
| Model No. | NEXDEP |
| Serial No. | 06442 |
| Location | Deposition (Bragg Centre) [1-086-0060-00MB-27] |
| Identifier | 10511541 |
| Organisation: | School of Electronic & Electrical Eng [50000070] |
| Owner |
|
| Contact |
Christopher Wood
c.d.wood@leeds.ac.uk 0113-34-38335 |
| Category / Taxonomy | Process Equipment - Physical > Lithography > Electron Beam |