Multi Chamber Deposition System
Details
| Manufacturer | PREVAC SP Z.O.O. |
|---|---|
| Model No. | |
| Serial No. | |
| Location | Sir William Henry Bragg Building [1-086-0060] |
| Identifier | 10511307 |
| Owner |
Bryan Hickey
b.j.hickey@leeds.ac.uk 0113-34-33836 |
| Contact |
Mannan Ali
m.ali2@leeds.ac.uk 0113-34-33833 |
| Category / Taxonomy | Process Equipment - Physical > Thin Film Deposition > Chemical Vapour Deposition |