Spectroscopic Ellipsometer
Details
| Manufacturer | LOT-QUANTUM DESIGN LTD |
|---|---|
| Model No. | 12-232400-1 |
| Serial No. | 170911DZ07854 |
| Location | Dry Etch Lab (Bragg Centre) [1-086-0060-00MB-22] |
| Identifier | 10510673 |
| Organisation: | School of Electronic & Electrical Eng [50000070] |
| Owner |
Christopher Wood
c.d.wood@leeds.ac.uk 0113-34-38335 |
| Contact |
Christopher Wood
c.d.wood@leeds.ac.uk 0113-34-38335 |
| Category / Taxonomy | Process Equipment - Physical > Characterisation(Process Equip-Physical) > Ellipsometry |