Plasma Enhanced Chemical Vapour Depositi
Plasma Enhanced Chemical Vapour Depositi
Details
| Manufacturer | ADVANCED VACUUM SYSTEMS |
|---|---|
| Model No. | VISION 310 PECVD |
| Serial No. | 2600148 |
| Location | Dry Etch Lab (Bragg Centre) [1-086-0060-00MB-22] |
| Identifier | 10507361 |
| Organisation: | School of Electronic & Electrical Eng [50000070] |
| Owner |
Edmund Linfield
e.h.linfield@leeds.ac.uk 0113-34-32015 |
| Contact |
Christopher Wood
c.d.wood@leeds.ac.uk 0113-34-38335 |
| Category / Taxonomy | Process Equipment - Physical > Thin Film Deposition > Chemical Vapour Deposition |