RIE Etching System
RIE Etching System
Details
| Manufacturer | ADVANCED VACUUM SYSTEMS AB |
|---|---|
| Model No. | APEX SLR ICP |
| Serial No. | 2400094 |
| Location | Dry Etch Lab (Bragg Centre) [1-086-0060-00MB-22] |
| Identifier | 10113855 |
| Organisation: | School of Electronic & Electrical Eng [50000070] |
| Owner | |
| Contact |
Christopher Wood
c.d.wood@leeds.ac.uk 0113-34-38335 |
| Category / Taxonomy | Process Equipment - Physical > Etching > Reactive Ion |