Mask Aligner, EV610
Mask Aligner, EV610
Details
| Manufacturer | EV GROUP |
|---|---|
| Model No. | |
| Serial No. | |
| Location | Photo Lith Lab (Bragg Centre) [1-086-0060-00MB-23] |
| Identifier | 10105542 |
| Organisation: | School of Electronic & Electrical Eng [50000070] |
| Owner |
Edmund Linfield
e.h.linfield@leeds.ac.uk 0113-34-32015 |
| Contact |
Christopher Wood
c.d.wood@leeds.ac.uk 0113-34-38335 |
| Category / Taxonomy | Process Equipment - Physical > Lithography > Optical (Lithography) (Genus) |