Edwards Evaporator
Edwards Evaporator
Edwards Evaporator
Description
The thermal evaporator use thermal heat to heat up a solid target source in a boat such as tungsten boat to its melting temperature, causing atoms to evaporate from the target to coat substrate in the vacuum chamber. Edwards Auto 306 evaporator has a base pressure of 2×10-6mBar pumped with dry rough pump and turbo pump. It has four boats for Ti, Au, Cr, Al evaporation.
Details
| Manufacturer | EDWARDS |
|---|---|
| Model No. | AUTO 306 |
| Serial No. | 3220 |
| Location | NanoTechnology Laboratory No.2 [1-086-0028-00GR-G64] |
| Identifier | 10077890 |
| Organisation: | School of Electronic & Electrical Eng [50000070] |
| Owner |
Edmund Linfield
e.h.linfield@leeds.ac.uk 0113-34-32015 |
| Contact | |
| Category / Taxonomy | Process Equipment - Physical > Thin Film Deposition > Evaporator |