Thermal Metal Evaporator
Thermal Metal Evaporator
Thermal Metal Evaporator
Description
Thermal evaporator uses thermal heating to heat up a solid target source in a boat such as tungsten boat to its melting temperature, causing atoms evaporated from the target to coat substrate in the vacuum chamber. The Leybold UNIVEX 300 thermal evaporator has a base pressure of 3×10-6mBar with rotatory rough pump and turbo pump. The evaporator is used mainly for ohmic contact with Au/Ge/Ni alloy. It has 5 boats that can potentially have more materials for evaporation.
Details
Manufacturer | OERLIKON LEYBOLD VACUUM |
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Model No. | UNIVEX 300 |
Serial No. | 30000641602 |
Location | Deposition (Bragg Centre) [1-086-0060-00MB-27] |
Identifier | 10077396 |
Organisation: | School of Electronic & Electrical Eng [50000070] |
Owner |
Edmund Linfield
e.h.linfield@leeds.ac.uk 0113-34-32015 |
Contact |
Christopher Wood
c.d.wood@leeds.ac.uk 0113-34-38335 |
Category / Taxonomy | Process Equipment - Physical > Thin Film Deposition > Evaporator |