Thermal Metal Evaporator

Description

Thermal evaporator uses thermal heating to heat up a solid target source in a boat such as tungsten boat to its melting temperature, causing atoms evaporated from the target to coat substrate in the vacuum chamber. The Leybold UNIVEX 300 thermal evaporator has a base pressure of 3×10-6mBar with rotatory rough pump and turbo pump. The evaporator is used mainly for ohmic contact with Au/Ge/Ni alloy. It has 5 boats that can potentially have more materials for evaporation.

Details

Manufacturer OERLIKON LEYBOLD VACUUM
Model No. UNIVEX 300
Serial No. 30000641602
Location Deposition (Bragg Centre) [1-086-0060-00MB-27]
Identifier 10077396
Organisation: School of Electronic & Electrical Eng [50000070]
Owner Edmund Linfield
e.h.linfield@leeds.ac.uk
0113-34-32015
Contact Christopher Wood
c.d.wood@leeds.ac.uk
0113-34-38335
Category / Taxonomy Process Equipment - Physical > Thin Film Deposition > Evaporator