Alpha Step IQ Surface Profiler
Alpha Step IQ Surface Profiler
Alpha Step IQ Surface Profiler
Description
Surface profiler is a tool that provides 2D high accurate measurement on semiconductor substrate by scanning a sharp diamond tipped stylus with 5 microns in radius across substrate surface. Topography information such as thin step heights and surface micro roughness can be determined. The Alpha Step Surface Profiler can measure height of 400 microns with a 5 nm accuracy and maximum scan length of 10 mm.
Details
| Manufacturer | LOT-ORIEL |
|---|---|
| Model No. | AS-IQ |
| Serial No. | 504107689 |
| Location | NanoTechnology Laboratory No.2 [1-086-0028-00GR-G64] |
| Identifier | 10077383 |
| Organisation: | School of Electronic & Electrical Eng [50000070] |
| Owner |
Edmund Linfield
e.h.linfield@leeds.ac.uk 0113-34-32015 |
| Contact |
Christopher Wood
c.d.wood@leeds.ac.uk 0113-34-38335 |
| Category / Taxonomy | Process Equipment - Physical > Characterisation(Process Equip-Physical) > Profilometer |