Vacuum experimentation system
Vacuum experimentation system
Vacuum experimentation system
Description
The Electron Beam evaporator provides physical vapour deposition. Inside the vacuum chamber a target source is bombarded with an electron beam emitted from a charged tungsten filament under high vacuum. The electron beam causes atoms from the target to transform into the gaseous phase, which then precipitates into solid form, coating substrate in the vacuum chamber with a thin layer. Leybold UNIVEX 350 can reach a base pressure beyond 1×10-6mBar with dry rough pump and cryo pump. Materials can be coated include Ti, Au, Pt, Ni, Cr, Ag, SiO2.
Details
| Manufacturer | OERLIKON LEYBOLD VACUUM |
|---|---|
| Model No. | UNIVEX 350 |
| Serial No. | 30000170440 |
| Location | NanoTechnology Laboratory No.2 [1-086-0028-00GR-G64] |
| Identifier | 10075788 |
| Organisation: | School of Electronic & Electrical Eng [50000070] |
| Owner |
Edmund Linfield
e.h.linfield@leeds.ac.uk 0113-34-32015 |
| Contact |
Christopher Wood
c.d.wood@leeds.ac.uk 0113-34-38335 |
| Category / Taxonomy | Process Equipment - Physical > Thin Film Deposition > Evaporator |